CIQTEK SEM5000Pro
High Resolution under Low Excitation
The CIQTEK SEM5000Pro is a Schottky field emission scanning electron microscope (FE-SEM) specialised in high resolution, even under low excitation voltage. Employing an advanced “Super-Tunnel” electron optics technology facilitates a crossover-free beam path together with an electrostatic-electromagnetic compound lens design.
These advancements reduce spatial charging effect, minimise lens aberrations, enhance imaging resolution at low voltage, and achieve a resolution of 1.2 nm at 1 kV, which allows for direct observation of non-conductive or semi-conductive samples, effectively reducing sample irradiation damage.
Key Features:
- Low Voltage High Resolution
- High Stability
- In-Lens Electron Detector
- Optional Specimen Exchange Loadlock (8 inches compatible)
- Electromagnetic Beam Deflection with Multi-hole Apertures
- Excellent Expandability
Highlights:
★ “Super Tunnel” electron optics column technology/in-lens beam deceleration
Decrease spatial charging effect, ensuring low voltage resolution.
★ Crossover-free in the electron beam path
Effectively reduce lens aberrations and improve resolution.
★ Electromagnetic & electrostatic compound objective lens
Reduce aberrations, significantly improve resolution at low voltages, and enable observation of magnetic samples.
★ Water-cooled constant-temperature objective lens
Ensure the stability, reliability, and repeatability of the objective lens operation.
★ Variable multi-hole aperture with electromagnetic beam deflection system
Automatic switching between apertures without mechanical motion, allowing fast switching between imaging modes.
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