CIQTEK High-Speed SEM HEM6000 – our flagship SEM system.
High-speed Scanning Electron Microscope for Cross-scale Imaging of Large-volume Specimens.
The CIQTEK High-Speed SEM HEM6000 facilitates technologies such as the high-brightness large-beam current electron gun, high-speed electron beam deflection system, high-voltage sample stage deceleration, dynamic optical axis, and immersion electromagnetic & electrostatic combo objective lens to achieve high-speed image acquisition whilst ensuring nano-scale resolution.
The automated operation process is designed for applications that require a more efficient and smarter large-area high-resolution imaging workflow. The imaging speed can reach over 5 times faster than a conventional field emission scanning electron microscope (FESEM).
Key Features:
- High-Speed Scanning Driver – Dwell time 10 ns/pixel, maximum imaging acquisition speed 2*100M pixel/s.
- Signal Electron Filtering System – SE/BSE signal-free switching, mixing with adjustable ratio.
- Fully Electrostatic High-Speed Beam Deflection System – High-resolution, large field imaging achievable maximum field of view up to 64um*64um at 4 nm per pixel.
- Sample Stage Deceleration Technology – Reduce incident electron landing voltage, increasing signal electron capturing efficiency.
- Electromagnetic & Electrostatic Combo Immersion Objective Lens Beam Deflection System – Objective lens magnetic field immerses sample, contributes low-aberration, high-resolution imaging.
| HEM6000-Semi | HEM6000-Bio | HEM6000-Lit |
| Low voltage & high resolution | Low voltage & high resolution | Simplified operation |
| Large field of view | Various automated algorithms for the biological field | Abundant selection options |
| Specially optimised algorithms for easy alignment of highly repetitive specimens | BSE Detector Optimized for biological applications | High-speed automated workflow |
| Five-stage electrostatic deflection | Biological 3D reconstruction system |
Highlights:
- High-speed Automation – Fully automatic sample loading & offloading process and image acquisition operation, which makes the overall imaging speed 5 times faster than that of conventional FESEM.
- Large Field of View – Technology that dynamically shifts the optical axis according to the scanning deflection range, and achieves minimum edge distortion.
- Low Imaging Distortion – Specimen stage tandem deceleration technology achieves low landing energy, whilst obtaining the finest quality high-resolution images.
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