CIQTEK SEM5000X
Ultra-high Resolution Field Emission Scanning Electron Microscopy (FESEM) Challenges the Limits
The CIQTEK SEM5000X is an ultra-high resolution FESEM with optimised electron optics column design, reducing overall aberrations by 30%, achieving ultra-high resolution of 0.6 nm@15 kV and 1.0 nm@1 kV. Its high resolution and stability make it advantageous in advanced nano-structural materials research, as well as the development and manufacturing of high-technology node semiconductor IC chips.
Key Features:
- Breakthrough Resolving Power
- Mechanical Eucentric Specimen Stage
- (Optional)Dual Beam Deceleration Mode (Duo-Dec)
- (Optional) Specimen Exchange Loadlock (8 inches compatible)
- High Stability
- Excellent Expandability
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